Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Testing of rod objects by grazing incidence interferometry: theory

Not Accessible

Your library or personal account may give you access

Abstract

Interferometry at grazing incidence allows one to perform macroscopic shape tests of rough surfaces with submicrometer precision. The highest measurement accuracy is achieved with a null test: the object wave front is adapted to the ideal surface under test through the use of diffractive optical elements. Deviations between the ideal and the real surface shape result in characteristic phase distributions at the interferometer output. Rod objects with rather arbitrary cross-section profiles are especially suitable for this type of measurement. The design of appropriate test wave fronts can be carried out by means of geometrical considerations. Expressions describing aberrations that are due to misalignments of the work piece can easily be derived. Misalignment aberrations and genuine surface deviations are separated by least-squares fitting.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Testing of rod objects by grazing-incidence interferometry: experiment

Sven Brinkmann, Thomas Dresel, Roland Schreiner, and Johannes Schwider
Appl. Opt. 38(1) 121-125 (1999)

Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object

S. Rothau, T. Schamburek, K. Mantel, and N. Lindlein
Appl. Opt. 61(15) 4246-4253 (2022)

Calibration for cylindrical specimens in grazing-incidence interferometry via integration of difference measurements

Klaus Mantel, Jürgen Lamprecht, Norbert Lindlein, and Johannes Schwider
Appl. Opt. 45(31) 8013-8018 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (34)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved