Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Balanced detector interferometric ellipsometer

Not Accessible

Your library or personal account may give you access

Abstract

A novel balanced detector interferometric ellipsometer (BDIE), composed of a polarized common-path optical heterodyne interferometer incorporating a novel balanced detector, provides an amplitude-sensitive method for measurement of the elliptical parameters of a thin film. The requirement for equal amplitude of the polarized heterodyne signals for balanced detection results in the simultaneous measurement of the elliptical parameters in terms of the azimuth angle of a half-wave plate and the output intensity from the differential amplifier, respectively. The common-path feature of BDIE shows a common phase noise rejection mode and this enhances the sensitivity of the phase measurement. At the same time, the balanced detector configuration of BDIE reduces excess noise of laser intensity fluctuation to give better sensitivity during measurement. The error of measurement of BDIE is derived and analyzed. Finally, the elliptical polarization effect of the laser beam is found to be independent of the measurement of the elliptical parameters.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
High speed interferometric ellipsometer

Chien-Chung Tsai, Hsiang-Chun Wei, Sheng-Lung Huang, Chu-En Lin, Chih-Jen Yu, and Chien Chou
Opt. Express 16(11) 7778-7788 (2008)

Interferometric ellipsometer

Lionel R. Watkins
Appl. Opt. 47(16) 2998-3001 (2008)

Optical balanced detection in heterodyne interferometric ellipsometry

Kuo-Chen Lang and Hui-Kang Teng
Appl. Opt. 54(27) 8108-8115 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (64)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved