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Aperiodic Fourier modal method in contrast-field formulation for simulation of scattering from finite structures

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Abstract

This paper extends the area of application of the Fourier modal method (FMM) from periodic structures to aperiodic ones, in particular for plane-wave illumination at arbitrary angles. This is achieved by placing perfectly matched layers at the lateral sides of the computational domain and reformulating the governing equations in terms of a contrast field that does not contain the incoming field. As a result of the reformulation, the homogeneous system of second-order ordinary differential equations from the original FMM becomes non-homogeneous. Its solution is derived analytically and used in the established FMM framework. The technique is demonstrated on a simple problem of planar scattering of TE-polarized light by a single rectangular line.

© 2010 Optical Society of America

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