Abstract

The dielectric constant of a uniform unsupported or embedded layer is shown to satisfy a cubic equation with coefficients determined by the angle of incidence and the measured complex ellipsometric ratio ρ = r_p/r_s. Analytic inversion is thus possible. The consequence of measurement errors on the deduced dielectric constant and layer thickness is explored.

© 1990 Optical Society of America

Inversion of reflection ellipsometric data

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