Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Generalized phase-shifting interferometry

Not Accessible

Your library or personal account may give you access

Abstract

We describe a generalized phase-shifting interferometry for which the reference phases are directly evaluated at each time that the interference fringe data are read. The reference phases are obtained from the additional straight fringes on the interfering plane by the fast-Fourier-transform method. According to error estimation, the repeatabilities in the measurements of optical surfaces are λ/500 rms, when the generalized algorithm with eight data acquisitions is used.

© 1991 Optical Society of America

Full Article  |  PDF Article
More Like This
Phase-shift calibration algorithm for phase-shifting interferometry

Xin Chen, Maureen Gramaglia, and John A. Yeazell
J. Opt. Soc. Am. A 17(11) 2061-2066 (2000)

Vibration in phase-shifting interferometry

Peter J. de Groot
J. Opt. Soc. Am. A 12(2) 354-365 (1995)

Blind phase shift estimation in phase-shifting interferometry

Hongwei Guo, Yingjie Yu, and Mingyi Chen
J. Opt. Soc. Am. A 24(1) 25-33 (2007)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (20)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved